VORRICHTUNG FÜR EIN PLASMAVERFAHREN

Patent europeic · EP1376669 · Stritgà

Inscripziun en il register

Numer da publicaziun
EP1376669
Numer da la dumonda
EP02708711
Gener
Patent europeic cun effect per la Svizra ed il Liechtenstein
Status
Stritgà
Scrittira da patent
Concedì
Annunzià
28-03-2002
Publitgà
02-01-2004
Concedì
09-05-2007
Stritgà
31-03-2013
Motiv
Taxa annuala betg pajada
Classas IPC
H01L 21/31 (2006.01)
H05H 1/46 (2006.01)
H01L 21/3065 (2006.01)
H01J 37/32 (2006.01)
Prioritad
JP 2001094271 28.03.2001
Dumonda PCT
PCT/JP2002/003109 28.03.2002
Publicaziun PCT
WO2002/080250 10.10.2002
Lingua da l’annunzia
giapunais
Funtauna
Swissreg

Istorgia

Quai che l’Institut federal da la proprietad intellectuala ha publitgà davart quest titel, il pli nov l’emprim.

  1. 23-10-2013

    Stritgà, taxa betg pajada

    Published in Swissreg on 23.10.2013

  2. 31-05-2011

    Adressa midada

    Representative
    Novagraaf International SA, 25, avenue du Pailly, 1220 Les Avanchets → Novagraaf International SA, Chemin de l'Echo 3, 1213 Onex

    Published in Swissreg on 31.05.2011

  3. 31-08-2007

    Represchentant inscrit

    Representative
    Novagraaf International SA, 25, avenue du Pailly, 1220 Les Avanchets

    Published in +pat+ No 16 in 2007

  4. 31-05-2007

    Concedì

    Published in +pat+ No 10 in 2007

Partidas

Possessur

OHMI, Tadahiro

1-17-301, Komegabukuro 2-chome, Aoba-ku, Sendai-shi, Miyagi-ken 980-0813, JP

Tokyo Electron Limited

TOKYO ELECTRON LIMITED

3-6 Akasaka 5-chome, Minato-ku, Tokyo 107-8481, JP

Represchentant

Novagraaf International SA

Chemin de l'Echo 3, 1213 Onex

Inventur

OHMI, Tadahiro

Sendai-Shi, Miyagi 980-0813, JP

HIRAYAMA, Masaki, c/o New Ind. Creation Hatch.Cent

Sendai-Shi, Miyagi 980-8579, JP

SUGAWA, Shigetoshi, c/o Manag. of Science & Techn.

Aramaki, Aoba-ku Sendai-Shi, Miyagi 980-, JP

GOTO, Tetsuya, c/o NEW IND. CR. HATCHERY CTER

Sendai-Shi, Miyagi 980-8579, JP

Il register numna mintga partida cun num ed adressa. In possessur u in represchentant vegn collià cun in’organisaziun, sch’exact ina unitad giuridica dal register da commerzi porta ses num; la via d’ina partida betg enconuschida uschia na vegn betg mussada qua.