Systeme d'etching par plasma à chambres multiples
Patent europeic · EP0264945 · Stritgà
Inscripziun en il register
- Numer da publicaziun
- EP0264945
- Numer da la dumonda
- EP87115508
- Gener
- Patent europeic cun effect per la Svizra ed il Liechtenstein
- Status
- Stritgà
- Scrittira da patent
- Concedì
- Annunzià
- 22-10-1987
- Publitgà
- 27-04-1988
- Concedì
- 13-03-1996
- Stritgà
- 13-03-1996
- Motiv
- Revocà en la procedura d’opposiziun
- Classas IPC
- H01L 21/00 (2006.01)H01J 37/20 (2006.01)H01J 37/18 (2006.01)
- Prioritad
- US 923125 24.10.1986
- Lingua da l’annunzia
- englais
- Funtauna
- Swissreg
Istorgia
Quai che l’Institut federal da la proprietad intellectuala ha publitgà davart quest titel, il pli nov l’emprim.
- 25-06-2024
Midada
Published in Swissreg on 25.06.2024
- 15-10-1997
Midada
Published in PIDTJ No 19 in 1997
- 28-06-1996
Concedì
Published in PIDTJ No 12 in 1996
- 15-03-1996
Represchentant inscrit
- Representative
- A. Braun, Braun, Héritier,, Eschmann AG, Patentanwälte, Holbeinstrasse 36-38, 4051 Basel
Published in PIDTJ No 5 in 1996
Partidas
Inventur
Maher, Joseph A.
South Hamilton Massachusetts, US
Vowles, E. John
Goffstown Massachusetts, US
Napoli, Joseph D.
Winham New Hampshire, US
Zafiropoulo, Arthur W.
Manchester Massachusetts, US
Miller, Mark W.
Burlington Massachusetts, US
Il register numna mintga partida cun num ed adressa. In possessur u in represchentant vegn collià cun in’organisaziun, sch’exact ina unitad giuridica dal register da commerzi porta ses num; la via d’ina partida betg enconuschida uschia na vegn betg mussada qua.