LITHOGRAFIEVERFAHREN UND LITHOGRAFIESYSTEM

Patent europeic · EP3006902 · Stritgà

Inscripziun en il register

Numer da publicaziun
EP3006902
Numer da la dumonda
EP15182014
Gener
Patent europeic cun effect per la Svizra ed il Liechtenstein
Status
Stritgà
Scrittira da patent
Concedì
Annunzià
16-02-2011
Publitgà
13-04-2016
Concedì
11-04-2018
Stritgà
28-02-2019
Motiv
Taxa annuala betg pajada
Classas IPC
G01D 5/38 (2006.01)
G01D 5/26 (2006.01)
G02B 6/00 (2006.01)
H01L 21/027 (2006.01)
Prioritad
US 319252 P 30.03.2010
US 327983 P 26.04.2010
US 422482 P 13.12.2010
Derivà da
EP11766307
Lingua da l’annunzia
englais
Funtauna
Swissreg

Istorgia

Quai che l’Institut federal da la proprietad intellectuala ha publitgà davart quest titel, il pli nov l’emprim.

  1. 18-09-2019

    Stritgà, taxa betg pajada

    Published in Swissreg on 18.09.2019

  2. 11-04-2018

    Concedì

    Published in Swissreg on 11.04.2018

Partidas

Possessur

ZYGO CORPORATION

Zygo Corporation

21 Laurel Brook Road, Middlefield, CT 06455-0448, US

Inventur

DECK, Leslie L.

Middletown, CT 06457, US

DE GROOT, Peter J.

Middletown, CT 06457, US

SCHROEDER, Michael

East Hampton, CT 06424, US

Il register numna mintga partida cun num ed adressa. In possessur u in represchentant vegn collià cun in’organisaziun, sch’exact ina unitad giuridica dal register da commerzi porta ses num; la via d’ina partida betg enconuschida uschia na vegn betg mussada qua.