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Patent europeic · EP3477691 · Stritgà

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Numer da publicaziun
EP3477691
Numer da la dumonda
EP17815100
Gener
Patent europeic cun effect per la Svizra ed il Liechtenstein
Status
Stritgà
Scrittira da patent
Concedì
Annunzià
26-05-2017
Publitgà
01-05-2019
Concedì
09-03-2022
Stritgà
23-12-2022
Motiv
Taxa annuala betg pajada
Classas IPC
H01L 21/67 (2006.01)
H01L 21/687 (2006.01)
H01J 37/32 (2006.01)
H01J 37/34 (2006.01)
Prioritad
JP 2016124984 23.06.2016
Dumonda PCT
PCT/JP2017/019685 26.05.2017
Publicaziun PCT
WO2017/221631 28.12.2017
Lingua da l’annunzia
giapunais
Funtauna
Swissreg

Istorgia

Quai che l’Institut federal da la proprietad intellectuala ha publitgà davart quest titel, il pli nov l’emprim.

  1. 18-01-2023

    Midada

    Published in Swissreg on 18.01.2023

  2. 23-12-2022

    Stritgà, taxa betg pajada

    Published in Swissreg on 23.12.2022

  3. 09-03-2022

    Concedì

    Published in Swissreg on 09.03.2022

Partidas

Possessur

ULVAC, INC.

Ulvac, Inc.

2500, Hagisono, Chigasaki-shi Kanagawa 253-8543, JP

Ulvac Cryogenics Inc.

1222-1, Yabata, Chigasaki-shi, Kanagawa 253-0085, JP

Inventur

TASHIRO Yukihito

Chigasaki-shi Kanagawa 253-8543, JP

FUKUMOTO Hidenori

Chigasaki-shi Kanagawa 253-8543, JP

TERASHIMA Mitsuki

Chigasaki-shi Kanagawa 253-0085, JP

HIDAKA Kosuke

Chigasaki-shi Kanagawa 253-0085, JP

ITOH Junichi

Chigasaki-shi Kanagawa 253-8543, JP

Il register numna mintga partida cun num ed adressa. In possessur u in represchentant vegn collià cun in’organisaziun, sch’exact ina unitad giuridica dal register da commerzi porta ses num; la via d’ina partida betg enconuschida uschia na vegn betg mussada qua.