SIN-REINIGUNG MIT CCP-PLASMA ODER RPS-REINIGUNG

Patent europeic · EP4363629 · En vigur

Inscripziun en il register

Numer da publicaziun
EP4363629
Numer da la dumonda
EP22834031
Gener
Patent europeic cun effect per la Svizra ed il Liechtenstein
Status
En vigur
Scrittira da patent
Concedì
Annunzià
28-06-2022
Publitgà
08-05-2024
Concedì
17-06-2026
La protecziun finescha il pli tard
27-06-2042
Proxima taxa annuala scadenta
30-06-2026
Classas IPC
C23C 14/56 (2006.01)
C23C 14/34 (2006.01)
C23C 14/50 (2006.01)
H01J 37/34 (2006.01)
H01J 37/32 (2006.01)
H10P 72/00 (2026.01)
Prioritad
US 202117362925 29.06.2021
Dumonda PCT
PCT/US2022/035236 28.06.2022
Publicaziun PCT
WO2023/278388 05.01.2023
Lingua da l’annunzia
englais
Funtauna
Swissreg

Istorgia

Quai che l’Institut federal da la proprietad intellectuala ha publitgà davart quest titel, il pli nov l’emprim.

  1. 17-06-2026

    Concedì

    Specification status
    Non-published patent application → Granted patent
    Status of protective title
    Initiated → Active

    Published in Swissreg on 17.06.2026

Partidas

Inventur

RAMALINGAM, Jothilingam

Santa Clara, California 95054, US

CAO, Yong

Santa Clara, California 95054, US

LAVITSKY, Ilya

Santa Clara, California 95054, US

MILLER, Keith A.

Santa Clara, California 95054, US

GUNG, Tza-Jing

Santa Clara, California 95054, US

TANG, Xianmin

Santa Clara, California 95054, US

LAVAN, Shane

Santa Clara, California 95054, US

SCHMIEDING, Randy D.

Santa Clara, California 95054, US

FORSTER, John C.

Santa Clara, California 95054, US

SAVANDAIAH, Kirankumar Neelasandra

Bangalore, Karnataka 560072, IN

Il register numna mintga partida cun num ed adressa. In possessur u in represchentant vegn collià cun in’organisaziun, sch’exact ina unitad giuridica dal register da commerzi porta ses num; la via d’ina partida betg enconuschida uschia na vegn betg mussada qua.