Sputterstation
Swiss patent · CH693508 · Deleted
Register entry
- Publication number
- CH693508
- Application number
- CH001816/1998
- Kind
- Swiss patent
- Status
- Deleted
- Specification
- Granted
- Filed
- Sep 4, 1998
- Published
- Sep 15, 2003
- Granted
- Sep 15, 2003
- Deleted
- Sep 30, 2008
- Reason
- Annual fee unpaid
- IPC classes
- C23C 14/34 (2006.01)H01J 37/34 (2006.01)
- Priority
- DE 297 16 440.6 12.09.1997
- Filing language
- German
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Apr 22, 2009
Deleted, fee unpaid
Published in Swissreg on 22.04.2009
- Oct 13, 2006
Address changed
- Owner
- Unaxis Balzers Aktiengesellschaft, 9496 Balzers, Liechtenstein → OC Oerlikon Balzers AG, Patentabteilung, Postfach 1000, 9496 Balzers, Liechtenstein
Published in +pat+ No 19 in 2006
- Sep 15, 2003
Address changed
- Owner
- Balzers Aktiengesellschaft, 9496 Balzers, Liechtenstein → Unaxis Balzers Aktiengesellschaft, 9496 Balzers, Liechtenstein
Published in +pat+ No 17 in 2003
- Sep 15, 2003
Granted
Published in +pat+ No 17 in 2003
Parties
Inventor
Roman Schertler
6922 Wolfurt, AT
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.