Ventilation d'une installation de traitement sous vide
European patent · EP0346018 · Deleted
Register entry
- Publication number
- EP0346018
- Application number
- EP89305588
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Jun 2, 1989
- Published
- Dec 13, 1989
- Granted
- Oct 5, 1994
- Deleted
- Jun 30, 1997
- Reason
- Annual fee unpaid
- IPC classes
- H01L 21/00 (2006.01)C23C 16/52 (2006.01)
- Priority
- US A 203009 06.06.1988
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Feb 13, 1998
Deleted, fee unpaid
Published in PIDTJ No 3 in 1998
- Nov 15, 1994
Granted
Published in PIDTJ No 21 in 1994
Parties
Inventor
Milgate, Robert W., III
Gloucester MA 01930, US
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.