Vakuumbehandlungsanlage

European patent · EP0518109 · Deleted

Register entry

Publication number
EP0518109
Application number
EP92108771
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
May 25, 1992
Published
Dec 16, 1992
Granted
Jan 28, 1998
Deleted
May 24, 2012
Reason
Maximum term reached
IPC classes
C23C 14/56 (2006.01)
C23C 14/50 (2006.01)
C23C 14/34 (2006.01)
H01L 21/00 (2006.01)
Priority
DE 4117969 31.05.1991
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. May 29, 2012

    Maximum term reached

    Published in Swissreg on 29.05.2012

  2. Oct 13, 2006

    Address changed

    Owner
    BALZERS AKTIENGESELLSCHAFT, 9496 Balzers, Liechtenstein → OC Oerlikon Balzers AG, Patentabteilung, Postfach 1000, 9496 Balzers, Liechtenstein

    Published in +pat+ No 19 in 2006

  3. Jan 30, 1998

    Granted

    Published in PIDTJ No 2 in 1998

Parties

Holder

OC Oerlikon Balzers AG

Patentabteilung Postfach 1000, 9496 Balzers, LI

Inventor

Schertler, Roman

A-6922 Wolfrut, AT

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.