Zentrifugaler Waferprozessor
European patent · EP0584081 · Deleted
Register entry
- Publication number
- EP0584081
- Application number
- EP92906110
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Aug 1, 1991
- Published
- Mar 2, 1994
- Granted
- Mar 12, 1997
- Deleted
- Mar 12, 1997
- Reason
- No effect for Switzerland and Liechtenstein
- IPC classes
- H01L 21/00 (2006.01)F26B 5/08 (2006.01)
- Priority
- US 703266 17.05.1991
- PCT application
- PCT/US1991/005546 01.08.1991
- PCT publication
- WO1992/020985 26.11.1992
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Sep 15, 1997
Change
Published in PIDTJ No 17 in 1997
- Mar 14, 1997
Granted
Published in PIDTJ No 5 in 1997
Parties
Inventor
THOMPSON, Raymon F.
Lakeside, MT 59922, US
OWCZARZ, Aleksander
Kalispell, MT 59901, US
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.