SUBSTRATVERARBEITUNGSVORRICHTUNG
European patent · EP1535313 · Deleted
Register entry
- Publication number
- EP1535313
- Application number
- EP03765906
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Jul 22, 2003
- Published
- Jun 1, 2005
- Granted
- Oct 31, 2018
- Deleted
- Jul 31, 2019
- Reason
- Annual fee unpaid
- IPC classes
- H01L 21/67 (2006.01)H01L 21/677 (2006.01)
- Priority
- US 397895 P 22.07.2002
- PCT application
- PCT/US2003/022881 22.07.2003
- PCT publication
- WO2004/010476 29.01.2004
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Feb 19, 2020
Deleted, fee unpaid
Published in Swissreg on 19.02.2020
- Oct 31, 2018
Granted
Published in Swissreg on 31.10.2018
Parties
Inventor
CAVENEY, Robert, T.
Windham, NH 03087, US
HOFMEISTER, Christopher, A.
Hampstead, NH 03841, US
WEISS, Mitchell
Carlisle, MA 01741-1605, US
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.