SUBSTRATVERARBEITUNGVORRICHTUNG
European patent · EP1805792 · Deleted
Register entry
- Publication number
- EP1805792
- Application number
- EP05807523
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Oct 11, 2005
- Published
- Jul 11, 2007
- Granted
- Dec 23, 2015
- Deleted
- Oct 31, 2016
- Reason
- Annual fee unpaid
- IPC classes
- H01L 21/67 (2006.01)H01L 21/677 (2006.01)
- Priority
- US 962787 09.10.2004
- PCT application
- PCT/US2005/036650 11.10.2005
- PCT publication
- WO2006/042273 20.04.2006
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- May 24, 2017
Deleted, fee unpaid
Published in Swissreg on 24.05.2017
- Dec 23, 2015
Granted
Published in Swissreg on 23.12.2015
Parties
Inventor
HOFMEISTER, Christopher
Hampstead, NH 03841, US
CAVENEY, Robert, T.
Windham, NH 03087, US
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.