VERFAHREN ZUR POSITIONIERUNG EINES WAFERS

European patent · EP1856730 · Deleted

Register entry

Publication number
EP1856730
Application number
EP06700022
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Jan 9, 2006
Published
Nov 21, 2007
Granted
Dec 29, 2010
Deleted
Jan 31, 2015
Reason
Annual fee unpaid
IPC classes
H01L 21/68 (2006.01)
H01L 21/00 (2006.01)
Priority
CH 3092005 22.02.2005
PCT application
PCT/CH2006/000015 09.01.2006
PCT publication
WO2006/089435 31.08.2006
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Aug 19, 2015

    Deleted, fee unpaid

    Published in Swissreg on 19.08.2015

  2. Feb 20, 2014

    Address changed

    Owner
    OC Oerlikon Balzers AG, Iramali 18, 9496 Balzers, Liechtenstein → Oerlikon Advanced Technologies AG, Iramali 18, 9496 Balzers, Liechtenstein

    Published in Swissreg on 20.02.2014

  3. Dec 29, 2010

    Granted

    Published in Swissreg on 29.12.2010

Parties

Holder

Oerlikon Advanced Technologies AG

Iramali 18, 9496 Balzers, LI

Inventor

SCHOLTE VAN MAST, Bart

CH-9478 Azmoos

CHRIST, Holger

CH-9478 Azmoos

SCHMUCKI, Ruedi

CH-9470 Buchs

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.