Plasmaentladungsvorrichtung

European patent · EP2233606 · Deleted

Register entry

Publication number
EP2233606
Application number
EP10168837
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Dec 6, 2001
Published
Sep 29, 2010
Granted
Feb 13, 2013
Deleted
Dec 31, 2013
Reason
Annual fee unpaid
IPC classes
C23C 16/509 (2006.01)
C23C 16/54 (2006.01)
C23C 4/18 (2006.01)
C23C 4/10 (2006.01)
C23C 16/40 (2006.01)
C23C 28/00 (2006.01)
G02B 1/10 (2006.01)
G02B 1/11 (2006.01)
H01T 19/00 (2006.01)
H01J 37/32 (2006.01)
Priority
JP 2000377044 12.12.2000
JP 2001175475 11.06.2001
Divided from
EP01270639
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jul 23, 2014

    Deleted, fee unpaid

    Published in Swissreg on 23.07.2014

  2. Feb 13, 2013

    Granted

    Published in Swissreg on 13.02.2013

Parties

Inventor

Fukuda, Kazuhiro

Tokyo 191-8511, JP

Kondo, Yoshikazu

Tokyo 191-8511, JP

Murakami, Takashi

Tokyo 191-8511, JP

Iwamaru, Shunichi

Tokyo 191-8511, JP

Muramatsu, Yumi

Tokyo 191-8511, JP

Tsuji, Toshio

Tokyo 191-8511, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.