KATALYSATOR-CVD-VORRICHTUNG

European patent · EP2374915 · Deleted

Register entry

Publication number
EP2374915
Application number
EP08878723
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Dec 9, 2008
Published
Oct 12, 2011
Granted
Jan 22, 2014
Deleted
Dec 31, 2014
Reason
Annual fee unpaid
IPC classes
C23C 16/44 (2006.01)
H01L 21/205 (2006.01)
PCT application
PCT/JP2008/072353 09.12.2008
PCT publication
WO2010/067424 17.06.2010
Filing language
Japanese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jul 22, 2015

    Deleted, fee unpaid

    Published in Swissreg on 22.07.2015

  2. Jan 22, 2014

    Granted

    Published in Swissreg on 22.01.2014

Parties

Holder

ULVAC, INC.

Ulvac, Inc.

2500, Hagisono, Chigasaki-shi Kanagawa 253-8543, JP

Inventor

OSONO, Shuji

Sammu-shi Chiba 289-1226, JP

HASHIMOTO, Masanori

Sammu-shi Chiba 289-1226, JP

ASARI, Shin

Sammu-shi Chiba 289-1226, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.