DAMPFABSCHEIDUNGSVORRICHTUNG

European patent · EP2684979 · Deleted

Register entry

Publication number
EP2684979
Application number
EP12755703
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Jan 30, 2012
Published
Jan 15, 2014
Granted
Aug 12, 2015
Deleted
Jan 31, 2016
Reason
Annual fee unpaid
IPC classes
C23C 16/44 (2006.01)
H01L 21/31 (2006.01)
H01L 21/683 (2006.01)
Priority
JP 2011051949 09.03.2011
PCT application
PCT/JP2012/051966 30.01.2012
PCT publication
WO2012/120941 13.09.2012
Filing language
Japanese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Aug 24, 2016

    Deleted, fee unpaid

    Published in Swissreg on 24.08.2016

  2. Aug 12, 2015

    Granted

    Published in Swissreg on 12.08.2015

Parties

Inventor

YAMAGUCHI, Akira

Tokyo 142-8558, JP

UBUKATA, Akinori

Tokyo 142-8558, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.