Vorreinigung einer Halbleiterstruktur

European patent · EP2849209 · Deleted

Register entry

Publication number
EP2849209
Application number
EP14184760
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Sep 15, 2014
Published
Mar 18, 2015
Granted
Nov 4, 2020
Deleted
Apr 28, 2022
Reason
Annual fee unpaid
IPC classes
H01L 21/02 (2006.01)
H01L 21/768 (2006.01)
H01L 21/311 (2006.01)
Priority
GB 201316446 16.09.2013
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Apr 28, 2022

    Deleted, fee unpaid

    Published in Swissreg on 28.04.2022

  2. Nov 4, 2020

    Granted

    Published in Swissreg on 04.11.2020

Parties

Holder

SPTS Technologies Limited

Coed Rhedyn Ringland Way, Newport Gwent NP18 2TA, GB

Inventor

Burgess, Stephen

Ebbw Vale, Gwent NP23 5NA, GB

Theodosiou, Alex

Caerphilly, CF83 3HA, GB

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.