SPUTTERTARGET MIT ERHÖHTER LEISTUNGSVERTRÄGLICHKEIT

European patent · EP2984674 · In force

Register entry

Publication number
EP2984674
Application number
EP14718509
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Apr 7, 2014
Published
Feb 17, 2016
Granted
Jun 6, 2018
Protection ends at the latest
Apr 6, 2034
Next annual fee due
Apr 30, 2027
IPC classes
H01J 37/34 (2006.01)
C23C 14/34 (2006.01)
Priority
US 201361809524 P 08.04.2013
PCT application
PCT/EP2014/000927 07.04.2014
PCT publication
WO2014/166620 16.10.2014
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. May 1, 2026

    Change

    Published in Swissreg on 01.05.2026

  2. May 1, 2025

    Change

    Published in Swissreg on 01.05.2025

  3. May 1, 2024

    Change

    Published in Swissreg on 01.05.2024

  4. May 1, 2023

    Change

    Published in Swissreg on 01.05.2023

  5. Jun 6, 2018

    Granted

    Published in Swissreg on 06.06.2018

Parties

Holder

Oerlikon Surface Solutions AG, Pfäffikon

Churerstrasse 120, 8808 Pfäffikon SZ

Inventor

KRASSNITZER, Siegfried

A-6800 Feldkirch, AT

HAGMANN, Juerg

CH-9468 Sax

KERSCHBAUMER, Joerg

A-6800 Feldkirch, AT

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.