ÄTZVERFAHREN

European patent · EP3086359 · Deleted

Register entry

Publication number
EP3086359
Application number
EP16166355
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Apr 21, 2016
Published
Oct 26, 2016
Granted
Sep 11, 2019
Deleted
Apr 30, 2020
Reason
Annual fee unpaid
IPC classes
H01L 21/311 (2006.01)
Priority
JP 2015087900 22.04.2015
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Nov 18, 2020

    Deleted, fee unpaid

    Published in Swissreg on 18.11.2020

  2. Sep 11, 2019

    Granted

    Published in Swissreg on 11.09.2019

Parties

Holder

Tokyo Electron Limited

TOKYO ELECTRON LIMITED

3-1, Akasaka 5-chome, Minato-ku Tokyo 107-6325, JP

Inventor

Igarashi, Yoshiki

Miyagi, 981-3629, JP

Tominaga, Sho

Miyagi, 981-3629, JP

Takayama, Wataru

Miyagi, 981-3629, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.