WAFERHALTEVORRICHTUNG
European patent · EP3410469 · Deleted
Register entry
- Publication number
- EP3410469
- Application number
- EP17179467
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Jul 4, 2017
- Published
- Dec 5, 2018
- Granted
- Sep 28, 2022
- Deleted
- Feb 23, 2024
- Reason
- Annual fee unpaid
- IPC classes
- H01L 21/683 (2006.01)H01L 21/687 (2006.01)H01L 27/146 (2006.01)
- Priority
- US 201715613139 03.06.2017
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Feb 23, 2024
Deleted, fee unpaid
Published in Swissreg on 23.02.2024
- Aug 9, 2023
Change
Published in Swissreg on 09.08.2023
- Sep 28, 2022
Granted
Published in Swissreg on 28.09.2022
Parties
Inventor
CHANG, Jui-Tang
Tainan City 74148, TW
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.