HERSTELLUNG EINER SCHICHT AUF EINEM HALBLEITERSUBSTRAT

European patent · EP3440693 · Deleted

Register entry

Publication number
EP3440693
Application number
EP17715681
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Apr 4, 2017
Published
Feb 13, 2019
Granted
Aug 25, 2021
Deleted
Nov 23, 2022
Reason
Annual fee unpaid
IPC classes
H01L 21/20 (2006.01)
Priority
US 201615093003 07.04.2016
PCT application
PCT/EP2017/057906 04.04.2017
PCT publication
WO2017/174535 12.10.2017
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Nov 23, 2022

    Deleted, fee unpaid

    Published in Swissreg on 23.11.2022

  2. Jul 6, 2022

    Change

    Published in Swissreg on 06.07.2022

  3. Aug 25, 2021

    Granted

    Published in Swissreg on 25.08.2021

Parties

Holder

AIXTRON SE

Aixtron SE

Dornkaulstrasse 2, 52134 Herzogenrath, DE

Inventor

NAG, Somnath

Saratoga California 95070, US

KELMAN, Maxim

Mountain View California 94043, US

JIA, Zhongyuan

Cupertina California 95014, US

DITIZIO, Robert

Petaluma California 94954, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.