ÜBERLAGERUNGSSTEUERUNG MIT VORHERSAGE VON OFFSET UNGLEICH NULL

Patent europeic · EP3548971 · Stritgà

Inscripziun en il register

Numer da publicaziun
EP3548971
Numer da la dumonda
EP18745244
Gener
Patent europeic cun effect per la Svizra ed il Liechtenstein
Status
Stritgà
Scrittira da patent
Concedì
Annunzià
24-01-2018
Publitgà
09-10-2019
Concedì
22-12-2021
Stritgà
24-08-2022
Motiv
Taxa annuala betg pajada
Classas IPC
G03F 7/20 (2006.01)
H01L 21/027 (2006.01)
Prioritad
US 201762450454 P 25.01.2017
US 201815867485 10.01.2018
Dumonda PCT
PCT/US2018/015104 24.01.2018
Publicaziun PCT
WO2018/140534 02.08.2018
Lingua da l’annunzia
englais
Funtauna
Swissreg

Istorgia

Quai che l’Institut federal da la proprietad intellectuala ha publitgà davart quest titel, il pli nov l’emprim.

  1. 02-11-2022

    Midada

    Published in Swissreg on 02.11.2022

  2. 24-08-2022

    Stritgà, taxa betg pajada

    Published in Swissreg on 24.08.2022

  3. 22-12-2021

    Concedì

    Published in Swissreg on 22.12.2021

Partidas

Possessur

KLA - Tencor Corporation

Kla-Tencor Corporation

Legal Department One Technology Drive, Milpitas, California 95035, US

Inventur

ADEL, Michael A.

30900 Ya'akov Zichron, IL

CHOI, Dongsub

Hwasung City Gyeonggi Province, KR

PIERSON, William

Austin, Texas 78730, US

YERUSHALMI, Liran

30900 Zicron Yaacob, IL

ALUMOT, Dror

7647001 Rehovot, IL

SUBRAHMANYAN, Pradeep

Cupertino, California 95014, US

HEO, Hoyoung

Gwangju-si Gyeonggi-do 31250, KR

MANASSEN, Amnon

34892 Haifa, IL

LEVY, Ady

San Jose, California 95125, US

ROBINSON, John

Austin, Texas 78731, US

Il register numna mintga partida cun num ed adressa. In possessur u in represchentant vegn collià cun in’organisaziun, sch’exact ina unitad giuridica dal register da commerzi porta ses num; la via d’ina partida betg enconuschida uschia na vegn betg mussada qua.