LINEARE PLASMAQUELLE MIT SEGMENTIERTER HOHLKATHODE

European patent · EP3619734 · Deleted

Register entry

Publication number
EP3619734
Application number
EP18720257
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Apr 27, 2018
Published
Mar 11, 2020
Granted
Mar 17, 2021
Deleted
Nov 18, 2021
Reason
Annual fee unpaid
IPC classes
H01J 37/32 (2006.01)
C23C 16/54 (2006.01)
Priority
EP 17169275 03.05.2017
PCT application
PCT/EP2018/060922 27.04.2018
PCT publication
WO2018/202584 08.11.2018
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jan 26, 2022

    Change

    Published in Swissreg on 26.01.2022

  2. Nov 18, 2021

    Deleted, fee unpaid

    Published in Swissreg on 18.11.2021

  3. Mar 17, 2021

    Granted

    Published in Swissreg on 17.03.2021

Parties

Inventor

DATZ, Marc

37697 Lauenförde, DE

CHAMBERS, John

San Francisco, California 94122, US

WIAME, Hugues

5537 Warnant, BE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.