VERFAHREN UND SYSTEM ZUR INSPEKTION EINES INNENBEHÄLTERS ODER EINES AUSSENBEHÄLTERS EINES EUV-BEHÄLTERS

European patent · EP4002008 · In force

Register entry

Publication number
EP4002008
Application number
EP20209306
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Nov 23, 2020
Published
May 25, 2022
Granted
May 20, 2026
Protection ends at the latest
Nov 22, 2040
Next annual fee due
Nov 30, 2026
IPC classes
G03F 1/66 (2012.01)
G01N 21/88 (2006.01)
G03F 1/84 (2012.01)
G03F 7/20 (2006.01)
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. May 20, 2026

    Granted

    Specification status
    Non-published patent application → Granted patent
    Status of protective title
    Initiated → Active

    Published in Swissreg on 20.05.2026

Parties

Inventor

REBSTOCK, Lutz

78343 Gaienhofen, DE

QUARTI, Ulrich

78467 Konstanz, DE

FORSTNER, Tobias

78256 Steisslingen, DE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.