PLASMAVERARBEITUNGSVORRICHTUNG
European patent · EP4017223 · In force
Register entry
- Publication number
- EP4017223
- Application number
- EP22156258
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- In force
- Specification
- Granted
- Filed
- Jun 26, 2018
- Published
- Jun 22, 2022
- Granted
- Oct 15, 2025
- Protection ends at the latest
- Jun 25, 2038
- Next annual fee due
- Jun 30, 2026
- IPC classes
- H05H 1/46 (2006.01)B01J 19/08 (2006.01)C23C 14/34 (2006.01)H01L 21/3065 (2006.01)H01J 37/32 (2006.01)H01J 37/34 (2006.01)
- Priority
- WO PCT/JP2017/023611 27.06.2017WO PCT/JP2017/023603 27.06.2017JP 2018017554 02.02.2018
- Divided from
- EP18823303
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Aug 26, 2026
Change
Published in Swissreg on 26.08.2026
- Oct 15, 2025
Granted
- Specification status
- Non-published patent application → Granted patent
- Status of protective title
- Initiated → Active
Published in Swissreg on 15.10.2025
Parties
Inventor
SEKIYA, Kazunari
Kawasaki-shi, 215-8550, JP
TANABE, Masaharu
Kawasaki-shi, 215-8550, JP
INOUE, Tadashi
Kawasaki-shi, 215-8550, JP
SASAMOTO, Hiroshi
Kawasaki-shi, 215-8550, JP
SATO, Tatsunori
Kawasaki-shi, 215-8550, JP
TSUCHIYA, Nobuaki
Kawasaki-shi, 215-8550, JP
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.