NANO UV
91140 Villebon sur Yvette
Patents
SOURCE A PLASMA DE RAYONS DIRIGES ET APPLICATION A LA MICROLITHOGRAPHIE
EP1673785
DISPOSITIF DE RADIOLOGIE COMPORTANT DES MOYENS D'AGRANDISSEMENT D'IMAGES PERFECTIONNEES
EP1213995
Holder of 2 patents, 0 in force.
From Swissreg, the register of the Federal Institute of Intellectual Property: Swiss patents and European patents with effect in Switzerland. A patent is listed here when its holder’s name is this entity’s.