Vakuumbehandlungskammer
Swiss patent · CH691686 · Deleted
Register entry
- Publication number
- CH691686
- Application number
- CH003251/1995
- Kind
- Swiss patent
- Status
- Deleted
- Specification
- Granted
- Filed
- Nov 16, 1995
- Published
- Sep 14, 2001
- Granted
- Sep 14, 2001
- Deleted
- Nov 30, 2009
- Reason
- Annual fee unpaid
- IPC classes
- C23C 14/34 (2006.01)C23C 14/35 (2006.01)H01L 21/314 (2006.01)H01J 37/34 (2006.01)
- Filing language
- German
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Jun 23, 2010
Deleted, fee unpaid
Published in Swissreg on 23.06.2010
- Oct 13, 2006
Address changed
- Owner
- Unaxis Balzers Aktiengesellschaft, 9496 Balzers, Liechtenstein → OC Oerlikon Balzers AG, Patentabteilung, Postfach 1000, 9496 Balzers, Liechtenstein
Published in +pat+ No 19 in 2006
- Sep 14, 2001
Address changed
- Owner
- Balzers Aktiengesellschaft, 9496 Balzers, Liechtenstein → Unaxis Balzers Aktiengesellschaft, 9496 Balzers, Liechtenstein
Published in PIDTJ No 17 in 2001
- Sep 14, 2001
Granted
Published in PIDTJ No 17 in 2001
Parties
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.