Trockenätzverfahren

European patent · EP0166893 · Deleted

Register entry

Publication number
EP0166893
Application number
EP85104927
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Apr 23, 1985
Published
Jan 8, 1986
Granted
Jan 18, 1989
Deleted
Apr 30, 1990
Reason
Annual fee unpaid
IPC classes
H01L 21/308 (2006.01)
H01L 21/316 (2006.01)
H01L 21/306 (2006.01)
Priority
CH A 2174/84 04.05.1984
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Oct 26, 2024

    Deleted, fee unpaid

    Published in Swissreg on 26.10.2024

  2. Feb 28, 1989

    Granted

    Published in PIDTJ No 4 in 1989

Parties

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.