Trockenätzverfahren
European patent · EP0166893 · Deleted
Register entry
- Publication number
- EP0166893
- Application number
- EP85104927
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Apr 23, 1985
- Published
- Jan 8, 1986
- Granted
- Jan 18, 1989
- Deleted
- Apr 30, 1990
- Reason
- Annual fee unpaid
- IPC classes
- H01L 21/308 (2006.01)H01L 21/316 (2006.01)H01L 21/306 (2006.01)
- Priority
- CH A 2174/84 04.05.1984
- Filing language
- German
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Oct 26, 2024
Deleted, fee unpaid
Published in Swissreg on 26.10.2024
- Feb 28, 1989
Granted
Published in PIDTJ No 4 in 1989
Parties
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.