Systeme d'etching par plasma à chambres multiples
European patent · EP0264945 · Deleted
Register entry
- Publication number
- EP0264945
- Application number
- EP87115508
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Oct 22, 1987
- Published
- Apr 27, 1988
- Granted
- Mar 13, 1996
- Deleted
- Mar 13, 1996
- Reason
- Revoked in opposition
- IPC classes
- H01L 21/00 (2006.01)H01J 37/20 (2006.01)H01J 37/18 (2006.01)
- Priority
- US 923125 24.10.1986
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Jun 25, 2024
Change
Published in Swissreg on 25.06.2024
- Oct 15, 1997
Change
Published in PIDTJ No 19 in 1997
- Jun 28, 1996
Granted
Published in PIDTJ No 12 in 1996
- Mar 15, 1996
Agent entered
- Representative
- A. Braun, Braun, Héritier,, Eschmann AG, Patentanwälte, Holbeinstrasse 36-38, 4051 Basel
Published in PIDTJ No 5 in 1996
Parties
Inventor
Maher, Joseph A.
South Hamilton Massachusetts, US
Vowles, E. John
Goffstown Massachusetts, US
Napoli, Joseph D.
Winham New Hampshire, US
Zafiropoulo, Arthur W.
Manchester Massachusetts, US
Miller, Mark W.
Burlington Massachusetts, US
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.