Système de vaporisation pour source d'ions
European patent · EP0291341 · Deleted
Register entry
- Publication number
- EP0291341
- Application number
- EP88304375
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- May 13, 1988
- Published
- Nov 17, 1988
- Granted
- Mar 14, 1990
- Deleted
- May 31, 1997
- Reason
- Annual fee unpaid
- IPC classes
- H01J 37/08 (2006.01)H01L 21/203 (2006.01)
- Priority
- US A 51076 15.05.1987
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Jan 15, 1998
Deleted, fee unpaid
Published in PIDTJ No 1 in 1998
- Apr 30, 1990
Granted
Published in PIDTJ No 8 in 1990
Parties
Inventor
Satoh, Shu
Rowley Massachusetts 01969, US
Evans, Louis E., jun.
Rockport Massachusetts 01966, US
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.