Lithographisches Verfahren
European patent · EP0556014 · Deleted
Register entry
- Publication number
- EP0556014
- Application number
- EP93300921
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Feb 9, 1993
- Published
- Aug 18, 1993
- Granted
- Oct 21, 1998
- Deleted
- Oct 21, 1998
- Reason
- No effect for Switzerland and Liechtenstein
- IPC classes
- G03F 7/32 (2006.01)
- Priority
- JP 57526/92 10.02.1992JP 233081/92 07.08.1992JP 233083/92 07.08.1992
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Apr 30, 1999
Change
Published in PIDTJ No 8 in 1999
- Oct 30, 1998
Granted
Published in PIDTJ No 20 in 1998
Parties
Holder
Inventor
Ohmi, Tadahiro
Sendai-shi, Miyagi-ken, JP
Shimada, Hisayuki, c/o Department of Electronics
Aramaki, Aoba-ku, Sendai-shi, Miyagi-ken, JP
Shimomura, Shigeki, c/o Department of Elctronics
Aramaki, Aoba-ku, Sendai-shi, Miyagi-ken, JP
Suzuki, Akiyoshi, c/o Canon Kabushiki Kaisha
Ohta-ku, Tokyo, JP
Miyawaki, Mamoru, c/o Canon Kabushiki Kaisha
Ohta-ku, Tokyo, JP
Noguchi, Miyoko, c/o Canon Kabushiki Kaisha
Ohta-ku, Tokyo, JP
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.