FLEXIBLER DURCHFLUSSREGLER

European patent · EP1026566 · Deleted

Register entry

Publication number
EP1026566
Application number
EP99935121
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Aug 9, 1999
Published
Aug 9, 2000
Granted
Oct 26, 2005
Deleted
Aug 31, 2009
Reason
Annual fee unpaid
IPC classes
G05D 7/06 (2006.01)
Priority
JP 23665698 24.08.1998
PCT application
PCT/JP1999/004311 09.08.1999
PCT publication
WO2000/011532 02.03.2000
Divided from
EP05076130
Filing language
Japanese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Mar 17, 2010

    Deleted, fee unpaid

    Published in Swissreg on 17.03.2010

  2. Nov 30, 2005

    Agent entered

    Representative
    Bovard AG, Patentanwälte, Optingenstrasse 16, 3000 Bern 25

    Published in +pat+ No 22 in 2005

  3. Oct 31, 2005

    Granted

    Published in +pat+ No 20 in 2005

Parties

Inventor

OHMI, Tadahiro

Sendai-shi, Miyagi 980-0813, JP

KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd.

Nirasaki-shi, Yamanashi 407-0003, JP

HIROSE, Jun, Tokyo Electron Yamanashi Ltd.

Nirasaki-shi, Yamanashi 407-0003, JP

NISHINO, Kouji, Fujikin Incorporated

Osaka-shi, Osaka 550-0012, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.