VAKUUMBEHANDLUNGSANLAGE

European patent · EP1042788 · Deleted

Register entry

Publication number
EP1042788
Application number
EP98955307
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Dec 3, 1998
Published
Oct 11, 2000
Granted
Sep 29, 2004
Deleted
Dec 31, 2005
Reason
Annual fee unpaid
IPC classes
H01L 21/00 (2006.01)
Priority
CH 294097 22.12.1997
CH 106598 13.05.1998
PCT application
PCT/CH1998/000513 03.12.1998
PCT publication
WO1999/033093 01.07.1999
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Aug 15, 2006

    Deleted, fee unpaid

    Published in +pat+ No 15 in 2006

  2. Sep 30, 2004

    Granted

    Published in +pat+ No 18 in 2004

Parties

Holder

Oerlikon Surface Solutions AG, Pfäffikon

Unaxis Trading AG

c/o Balzers AG, 9477 Trübbach

Inventor

SCHERTLER, Roman

A-6922 Wolfurt, AT

DUBS, Martin

CH-7304 Maienfeld

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.