Vakuumsystem

European patent · EP1536454 · Deleted

Register entry

Publication number
EP1536454
Application number
EP04027862
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Nov 24, 2004
Published
Jun 1, 2005
Granted
Jul 25, 2012
Deleted
Nov 30, 2014
Reason
Annual fee unpaid
IPC classes
C23C 14/56 (2006.01)
H01L 21/677 (2006.01)
H01L 21/67 (2006.01)
Priority
DE 10355678 28.11.2003
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jun 17, 2015

    Deleted, fee unpaid

    Published in Swissreg on 17.06.2015

  2. Sep 26, 2012

    Agent entered

    Representative
    Vossius & Partner, Nadelberg 3, 4051 Basel

    Published in Swissreg on 26.09.2012

  3. Jul 25, 2012

    Granted

    Published in Swissreg on 25.07.2012

Parties

Holder

Singulus Technologies AG

Hanauer Landstrasse 103, 63796 Kahl/Main, DE

Agent

Vossius & Partner

Nadelberg 3, 4051 Basel

Inventor

Kempf, Stefan

63755 Alzenau, DE

Merz, Thomas

63739 Aschaffenburg, DE

Mücke, Michael, Dr.

61206 Wöllstadt, DE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.