MANIPULATIONSEINRICHTUNG FÜR RETIKEL
European patent · EP1540459 · Deleted
Register entry
- Publication number
- EP1540459
- Application number
- EP03788279
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Jul 29, 2003
- Published
- Jun 15, 2005
- Granted
- May 27, 2020
- Deleted
- Jul 31, 2020
- Reason
- Annual fee unpaid
- IPC classes
- G03F 7/20 (2006.01)H01L 21/673 (2006.01)H01L 21/677 (2006.01)H01L 21/687 (2006.01)
- Priority
- CH 132802 29.07.2002
- PCT application
- PCT/US2003/023445 29.07.2003
- PCT publication
- WO2004/017366 26.02.2004
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Feb 17, 2021
Deleted, fee unpaid
Published in Swissreg on 17.02.2021
- May 27, 2020
Granted
Published in Swissreg on 27.05.2020
Parties
Inventor
BLATTNER, Jakob
8272 Ermatingen
FOSNIGHT, William, John
Carlisle, MA 01741, US
HARIS, Clint
Lunenburg, MA 01462, US
FEDERICI, Rudy
8572 Berg
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.