SUBSTRATVERARBEITUNGSSYSTEM

European patent · EP1630858 · Deleted

Register entry

Publication number
EP1630858
Application number
EP04717277
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Mar 4, 2004
Published
Mar 1, 2006
Granted
Feb 15, 2012
Deleted
Mar 31, 2012
Reason
Annual fee unpaid
IPC classes
H01L 21/00 (2006.01)
H01L 21/02 (2006.01)
Priority
JP 2003057202 04.03.2003
PCT application
PCT/JP2004/002705 04.03.2004
PCT publication
WO2004/079808 16.09.2004
Filing language
Japanese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Oct 17, 2012

    Deleted, fee unpaid

    Published in Swissreg on 17.10.2012

  2. Feb 15, 2012

    Granted

    Published in Swissreg on 15.02.2012

Parties

Holder

Tokyo Electron Limited

TOKYO ELECTRON LIMITED

3-1, Akasaka 5-chome, Minato-ku Tokyo 107-6325, JP

OHMI, Tadahiro

Ohmi, Tadahiro

301, 1-17, Komegafukuro 2-chome, Aoba-ku, Sendai-shi, Miyagi 980-0813, JP

Inventor

OHMI, Tadahiro

Sendai-shi, Miyagi 980-0813, JP

TERAMOTO, Akinobu

Sendai-shi, Miyagi 980-0037, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.