SOURCE A PLASMA DE RAYONS DIRIGES ET APPLICATION A LA MICROLITHOGRAPHIE
European patent · EP1673785 · Deleted
Register entry
- Publication number
- EP1673785
- Application number
- EP04817228
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Oct 18, 2004
- Published
- Jun 28, 2006
- Granted
- May 16, 2007
- Deleted
- Oct 31, 2011
- Reason
- Annual fee unpaid
- IPC classes
- G21K 1/06 (2006.01)H05G 2/00 (2006.01)
- Priority
- FR 0312202 17.10.2003
- PCT application
- PCT/FR2004/002656 18.10.2004
- PCT publication
- WO2005/038822 28.04.2005
- Filing language
- French
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- May 23, 2012
Deleted, fee unpaid
Published in Swissreg on 23.05.2012
- Mar 31, 2008
Transferred
- Owner
- EPPRA, 16, avenue du Québec,, Parc d'Affaires Silic de Villebon Courtaboeuf, 91140 Villebon sur Yvette, France → NANO-UV, 16, avenue deu Quebec, 91140 VILLEBON SUR YVETTE, France
Published in +pat+ No 6 in 2008
- Mar 31, 2008
Agent entered
- Representative
- Dr. Joachim Lauer, Patentanwalt, Stapferstrasse 5,, Postfach 2651, 8033 Zürich
Published in +pat+ No 6 in 2008
- Jun 29, 2007
Agent entered
- Representative
- MICHELI & CIE SA, 122, Rue de Genève, Case postale 61, 1226 Thônex
Published in +pat+ No 12 in 2007
- Jun 15, 2007
Granted
Published in +pat+ No 11 in 2007
Parties
Inventor
CHOI, Peter
F-91400 Orsay, FR
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.