HERSTELLUNGSVERFAHREN

European patent · EP1702359 · Deleted

Register entry

Publication number
EP1702359
Application number
EP04744316
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Aug 23, 2004
Published
Sep 20, 2006
Granted
Dec 9, 2009
Deleted
Aug 31, 2013
Reason
Annual fee unpaid
IPC classes
H01L 21/768 (2006.01)
H01L 21/027 (2006.01)
G03F 7/00 (2006.01)
Priority
EP 03021935 29.09.2003
PCT application
PCT/IB2004/002724 23.08.2004
PCT publication
WO2005/031855 07.04.2005
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Mar 19, 2014

    Deleted, fee unpaid

    Published in Swissreg on 19.03.2014

  2. Feb 24, 2010

    Agent entered

    Representative
    IBM Research GmbH, Zurich Research Laboratory, Intellectual Property Law, Säumerstrasse 4, 8803 Rüschlikon

    Published in Swissreg on 24.02.2010

  3. Dec 9, 2009

    Granted

    Published in Swissreg on 09.12.2009

Parties

Holder

International Business Machines Corporation

New Orchard Road, Armonk, NY 10504, US

Agent

IBM Research GmbH

IBM Research GmbH Zurich Research Laboratory Intellectual Property Law

Säumerstrasse 4, 8803 Rüschlikon

Inventor

BIETSCH, Alexander

CH-8803 Rueschlikon

MICHEL, Bruno

CH-8134 Adliswil

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.