Sputterabscheidung von Molybdänschichten

European patent · EP1862563 · In force

Register entry

Publication number
EP1862563
Application number
EP07010658
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
May 30, 2007
Published
Dec 5, 2007
Granted
Mar 30, 2011
Protection ends at the latest
May 29, 2027
Next annual fee due
May 31, 2027
IPC classes
C23C 14/14 (2006.01)
Priority
DE 102006026672 02.06.2006
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jun 1, 2026

    Change

    Published in Swissreg on 01.06.2026

  2. Jun 1, 2025

    Change

    Published in Swissreg on 01.06.2025

  3. Dec 17, 2024

    Agent’s address changed

    Representative
    WEINMANN ZIMMERLI, Apollostrasse 2, Postfach 1021, 8032 Zürich → WEINMANN ZIMMERLI, Carmenstrasse 28, 8032 Zürich

    Published in Swissreg on 17.12.2024

  4. Jun 2, 2024

    Change

    Published in Swissreg on 02.06.2024

  5. Jun 9, 2023

    Change

    Published in Swissreg on 09.06.2023

  6. Sep 22, 2021

    Agent removed

    Representative
    Wagner Patent AG, Bächerstrasse 9, 8832 Wollerau (removed)

    Published in Swissreg on 22.09.2021

  7. Mar 13, 2019

    Address changed

    Owner
    Manz CIGS Technology GmbH, Alfred-Leikam-Strasse 25, 74523 Schwäbisch Hall, Germany → NICE Solar Energy GmbH, Alfred-Leikam-Strasse 25, 74523 Schwäbisch Hall, Germany

    Published in Swissreg on 13.03.2019

  8. Apr 11, 2017

    Transferred

    Owner
    Würth Solar GmbH & Co. KG, Alfred-Leikam-Strasse 25, 74523 Schwäbisch Hall, Germany → Manz CIGS Technology GmbH, Alfred-Leikam-Strasse 25, 74523 Schwäbisch Hall, Germany

    Published in Swissreg on 11.04.2017

5 earlier entries
  1. Apr 8, 2017

    Agent entered

    Representative
    WEINMANN ZIMMERLI, Apollostrasse 2, Postfach 1021, 8032 Zürich

    Published in Swissreg on 08.04.2017

  2. Apr 8, 2017

    Address changed

    Owner
    Würth Solar GmbH & Co. KG, Reinhold-Würth-Strasse 4, 71672 Marbach, Germany → Würth Solar GmbH & Co. KG, Alfred-Leikam-Strasse 25, 74523 Schwäbisch Hall, Germany

    Published in Swissreg on 08.04.2017

  3. Mar 5, 2014

    Agent entered

    Representative
    Zimmerli, Wagner & Partner AG, Apollostrasse 2, Postfach 1021, 8032 Zürich → Wagner Patent AG, Bächerstrasse 9, 8832 Wollerau

    Published in Swissreg on 05.03.2014

  4. Jun 17, 2011

    Agent entered

    Representative
    Zimmerli, Wagner & Partner AG, Apollostrasse 2, Postfach 1021, 8032 Zürich

    Published in Swissreg on 17.06.2011

  5. Mar 30, 2011

    Granted

    Published in Swissreg on 30.03.2011

Parties

Inventor

Menner, Richard

70374 Stuttgart, DE

Oertel, Mike

70176 Stuttgart, DE

Sprecher, Bernd

74427 Fichtenberg, DE

Dimmler, Bernhard

74523 Schwäbisch Hall, DE

Bauer, Tino

74226 Nordheim, DE

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.