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European patent · EP1945541 · Deleted

Register entry

Publication number
EP1945541
Application number
EP06837141
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Nov 7, 2006
Published
Jul 23, 2008
Granted
Apr 10, 2013
Deleted
Nov 30, 2013
Reason
Annual fee unpaid
IPC classes
H01L 21/677 (2006.01)
Priority
US 733813 P 07.11.2005
US 556584 03.11.2006
US 594365 07.11.2006
PCT application
PCT/US2006/043462 07.11.2006
PCT publication
WO2007/056443 18.05.2007
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jun 18, 2014

    Deleted, fee unpaid

    Published in Swissreg on 18.06.2014

  2. Apr 10, 2013

    Granted

    Published in Swissreg on 10.04.2013

Parties

Holder

Brooks Automation, Inc.

15 Elizabeth Drive, Chelmsford, MA 01824, US

Inventor

BUFANO, Michael, L.

Belmont, MA 02478, US

GILCHRIST, Ulysses

Reading, MA 01867, US

FOSNIGHT, William

Carlisle, MA 01741, US

HOFMEISTER, Christopher

Hampstead, NH 03841, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.