ENTFLUORISIERUNGSPROZESS
European patent · EP2074648 · Deleted
Register entry
- Publication number
- EP2074648
- Application number
- EP07843846
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Oct 4, 2007
- Published
- Jul 1, 2009
- Granted
- Jan 4, 2012
- Deleted
- Oct 31, 2012
- Reason
- Annual fee unpaid
- IPC classes
- H01L 21/027 (2006.01)H01L 21/033 (2006.01)H01L 21/3105 (2006.01)H01L 21/311 (2006.01)H01L 21/312 (2006.01)H01L 21/3213 (2006.01)H01L 21/768 (2006.01)
- Priority
- US 545903 10.10.2006
- PCT application
- PCT/US2007/080455 04.10.2007
- PCT publication
- WO2008/045764 17.04.2008
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- May 22, 2013
Deleted, fee unpaid
Published in Swissreg on 22.05.2013
- Jan 4, 2012
Granted
Published in Swissreg on 04.01.2012
Parties
Inventor
HEO, Dongho
Fremont, California 94538, US
KIM, Jisoo
Pleasanton, California 94588, US
SADJADI, S.M. Reza
Saratoga, California 95070, US
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.