Interferometrische Analyse von Oberflächen

European patent · EP2275868 · Deleted

Register entry

Publication number
EP2275868
Application number
EP10177299
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Sep 15, 2004
Published
Jan 19, 2011
Granted
Feb 28, 2018
Deleted
Sep 30, 2018
Reason
Annual fee unpaid
IPC classes
G03F 7/20 (2006.01)
G01B 9/02 (2006.01)
G01B 11/00 (2006.01)
Priority
US 502932 P 15.09.2003
US 502933 P 15.09.2003
US 502907 P 15.09.2003
US 502930 P 15.09.2003
US 539437 P 26.01.2004
Divided from
EP04788766
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Apr 17, 2019

    Deleted, fee unpaid

    Published in Swissreg on 17.04.2019

  2. Feb 28, 2018

    Granted

    Published in Swissreg on 28.02.2018

Parties

Holder

ZYGO CORPORATION

Zygo Corporation

21 Laurel Brook Road, Middlefield, CT 06455-0448, US

Inventor

De Groot, Peter J.

Middletown, CT 06457, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.