FILMBILDUNGSVERFAHREN

European patent · EP2381483 · Deleted

Register entry

Publication number
EP2381483
Application number
EP09835076
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Dec 28, 2009
Published
Oct 26, 2011
Granted
Dec 10, 2014
Deleted
Jul 23, 2025
Reason
Annual fee unpaid
IPC classes
H01L 31/04 (2014.01)
C23C 16/509 (2006.01)
H01L 31/0216 (2014.01)
H01L 31/0224 (2006.01)
H01L 31/18 (2006.01)
Priority
JP 2008335051 26.12.2008
PCT application
PCT/JP2009/071767 28.12.2009
PCT publication
WO2010/074283 01.07.2010
Filing language
Japanese
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jul 23, 2025

    Deleted, fee unpaid

    Status of protective title
    Active → Cancelled
    Cancellation date
    23.07.2025
    Cause for cancellation
    Non-payment of renewal fee

    Published in Swissreg on 23.07.2025

  2. Jan 1, 2024

    Change

    Published in Swissreg on 01.01.2024

  3. Jan 4, 2023

    Change

    Published in Swissreg on 04.01.2023

  4. Jan 28, 2015

    Agent entered

    Representative
    Ammann Patentanwälte AG Bern, Schwarztorstrasse 31, 3001 Bern

    Published in Swissreg on 28.01.2015

  5. Dec 10, 2014

    Granted

    Published in Swissreg on 10.12.2014

Parties

Holder

ULVAC, INC.

2500 Hagisono, Chigasaki-shi Kanagawa 253-8543, JP

Agent

Ammann Patentanwälte AG

Ammann Patentanwälte AG Bern

Schwarztorstrasse 31, 3001 Bern

Inventor

KUBO Masashi

Chigasaki-shi Kanagawa 253-8543, JP

KIKUCHI Makoto

Chigasaki-shi Kanagawa 253-8543, JP

SAITO Kazuya

Sammu-shi Chiba 289-1226, JP

WATAI Miwa

Sammu-shi Chiba 289-1226, JP

SHIMIZU Miho

Sammu-shi Chiba 289-1226, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.