VAKUUMBEHANDLUNGSGERÄT
European patent · EP2409317 · Deleted
Register entry
- Publication number
- EP2409317
- Application number
- EP10714592
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Mar 11, 2010
- Published
- Jan 25, 2012
- Granted
- Dec 11, 2013
- Deleted
- Mar 31, 2015
- Reason
- Annual fee unpaid
- IPC classes
- H01L 21/67 (2006.01)H01L 21/677 (2006.01)
- Priority
- US 161084 P 18.03.2009
- PCT application
- PCT/EP2010/053140 11.03.2010
- PCT publication
- WO2010/105967 23.09.2010
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Oct 21, 2015
Deleted, fee unpaid
Published in Swissreg on 21.10.2015
- Dec 11, 2013
Granted
Published in Swissreg on 11.12.2013
Parties
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.