VAKUUMBEHANDLUNGSGERÄT

European patent · EP2659507 · Deleted

Register entry

Publication number
EP2659507
Application number
EP11808653
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
Dec 27, 2011
Published
Nov 6, 2013
Granted
Sep 14, 2022
Deleted
Jul 25, 2023
Reason
Annual fee unpaid
IPC classes
H01L 21/677 (2006.01)
H01L 21/67 (2006.01)
H01J 37/32 (2006.01)
Priority
US 201061427861 P 29.12.2010
PCT application
PCT/EP2011/074095 27.12.2011
PCT publication
WO2012/089733 05.07.2012
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Jul 26, 2023

    Change

    Published in Swissreg on 26.07.2023

  2. Jul 25, 2023

    Deleted, fee unpaid

    Published in Swissreg on 25.07.2023

  3. Sep 14, 2022

    Granted

    Published in Swissreg on 14.09.2022

Parties

Holder

Evatec AG

Hauptstrasse 1A, 9477 Trübbach

Inventor

BAZLEN, Rolf

CH-9400 Rorschach

RIETZLER, Wolfgang

A-6700 Bludenz, AT

ROHRER, Daniel

CH-8887 Mels

SCHOLTE VON MAST, Bart

CH-9478 Azmoos

LODDER, Rogier

CH-7310 Bad Ragaz

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.