DAMPFABSCHEIDUNGSVORRICHTUNG
European patent · EP2684979 · Deleted
Register entry
- Publication number
- EP2684979
- Application number
- EP12755703
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Jan 30, 2012
- Published
- Jan 15, 2014
- Granted
- Aug 12, 2015
- Deleted
- Jan 31, 2016
- Reason
- Annual fee unpaid
- IPC classes
- C23C 16/44 (2006.01)H01L 21/31 (2006.01)H01L 21/683 (2006.01)
- Priority
- JP 2011051949 09.03.2011
- PCT application
- PCT/JP2012/051966 30.01.2012
- PCT publication
- WO2012/120941 13.09.2012
- Filing language
- Japanese
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Aug 24, 2016
Deleted, fee unpaid
Published in Swissreg on 24.08.2016
- Aug 12, 2015
Granted
Published in Swissreg on 12.08.2015
Parties
Inventor
YAMAGUCHI, Akira
Tokyo 142-8558, JP
UBUKATA, Akinori
Tokyo 142-8558, JP
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.