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European patent · EP2697822 · In force

Register entry

Publication number
EP2697822
Application number
EP12771676
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Apr 11, 2012
Published
Feb 19, 2014
Granted
Dec 30, 2020
Protection ends at the latest
Apr 10, 2032
Next annual fee due
Apr 30, 2027
IPC classes
H01L 21/50 (2006.01)
H01L 21/683 (2006.01)
H01L 21/67 (2006.01)
H01L 21/58 (2006.01)
Priority
US 201161473988 P 11.04.2011
PCT application
PCT/US2012/033147 11.04.2012
PCT publication
WO2012/142177 18.10.2012
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Oct 20, 2026

    Agent’s address changed

    Representative
    Dr. Lusuardi AG, Kreuzbühlstrasse 8, 8008 Zürich → Dr. Lusuardi AG, Stockerstrasse 8, 8002 Zürich

    Published in Swissreg on 20.10.2026

  2. May 1, 2026

    Next annual fee due on

    Next annual fee due on
    30.04.2026 → 30.04.2027

    Published in Swissreg on 01.05.2026

  3. May 1, 2025

    Next annual fee due on

    Next annual fee due on
    30.04.2025 → 30.04.2026

    Published in Swissreg on 01.05.2025

  4. May 1, 2024

    Change

    Published in Swissreg on 01.05.2024

  5. May 1, 2023

    Change

    Published in Swissreg on 01.05.2023

  6. Nov 10, 2021

    Change

    Published in Swissreg on 10.11.2021

  7. Feb 9, 2021

    Agent entered

    Representative
    Dr. Lusuardi AG, Kreuzbühlstrasse 8, 8008 Zürich

    Published in Swissreg on 09.02.2021

  8. Dec 30, 2020

    Granted

    Published in Swissreg on 30.12.2020

Parties

Inventor

SARWAR, Ferdous

Buet, Dhaka-1000, BD

CHEN, Zhigang

Fargo, North Dakota 58103, US

MARINOV, Val

Fargo, North Dakota 58102, US

SWENSON, Orven

Fargo, North Dakota 58103, US

SEMLER, Matthew

Appleton, Minnesota 56208, US

PAVICIC, Mark

Fargo, North Dakota 58103, US

MILLER, Ross

Moorhead, Minnesota 56560, US

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.