REAKTIVER SPUTTERPROZESS

European patent · EP2789006 · In force

Register entry

Publication number
EP2789006
Application number
EP12810067
Kind
European patent with effect for Switzerland and Liechtenstein
Status
In force
Specification
Granted
Filed
Nov 23, 2012
Published
Oct 15, 2014
Granted
Oct 31, 2018
Protection ends at the latest
Nov 22, 2032
Next annual fee due
Nov 30, 2026
IPC classes
H01J 37/34 (2006.01)
C23C 14/00 (2006.01)
C23C 14/34 (2006.01)
Priority
US 201161566836 P 05.12.2011
PCT application
PCT/EP2012/004848 23.11.2012
PCT publication
WO2013/083238 13.06.2013
Filing language
German
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Dec 1, 2025

    Change

    Published in Swissreg on 01.12.2025

  2. Dec 1, 2024

    Change

    Published in Swissreg on 01.12.2024

  3. Dec 1, 2023

    Change

    Published in Swissreg on 01.12.2023

  4. Dec 1, 2022

    Change

    Published in Swissreg on 01.12.2022

  5. Oct 31, 2018

    Granted

    Published in Swissreg on 31.10.2018

Parties

Holder

Oerlikon Surface Solutions AG, Pfäffikon

Churerstrasse 120, 8808 Pfäffikon

Inventor

KRASSNITZER, Siegfried

A-6800 Feldkirch, AT

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.