Trockenätzverfahren
European patent · EP2808423 · Deleted
Register entry
- Publication number
- EP2808423
- Application number
- EP14001853
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- May 28, 2014
- Published
- Dec 3, 2014
- Granted
- Aug 2, 2017
- Deleted
- May 31, 2018
- Reason
- Annual fee unpaid
- IPC classes
- C23F 1/12 (2006.01)C23F 4/02 (2006.01)H01L 21/3213 (2006.01)
- Priority
- JP 2013116250 31.05.2013
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Dec 19, 2018
Deleted, fee unpaid
Published in Swissreg on 19.12.2018
- Aug 2, 2017
Granted
Published in Swissreg on 02.08.2017
Parties
Inventor
Kikuchi, Akiou
Ube City Yamaguchi, 755-0001, JP
Takeda, Yuta
Ube City Yamaguchi, 755-0001, JP
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.