Trockenätzverfahren

European patent · EP2808423 · Deleted

Register entry

Publication number
EP2808423
Application number
EP14001853
Kind
European patent with effect for Switzerland and Liechtenstein
Status
Deleted
Specification
Granted
Filed
May 28, 2014
Published
Dec 3, 2014
Granted
Aug 2, 2017
Deleted
May 31, 2018
Reason
Annual fee unpaid
IPC classes
C23F 1/12 (2006.01)
C23F 4/02 (2006.01)
H01L 21/3213 (2006.01)
Priority
JP 2013116250 31.05.2013
Filing language
English
Source
Swissreg

History

What the Federal Institute of Intellectual Property published about this title, newest first.

  1. Dec 19, 2018

    Deleted, fee unpaid

    Published in Swissreg on 19.12.2018

  2. Aug 2, 2017

    Granted

    Published in Swissreg on 02.08.2017

Parties

Inventor

Kikuchi, Akiou

Ube City Yamaguchi, 755-0001, JP

Takeda, Yuta

Ube City Yamaguchi, 755-0001, JP

The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.