PROZESSMODUL
European patent · EP2812916 · Deleted
Register entry
- Publication number
- EP2812916
- Application number
- EP13709539
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Jan 17, 2013
- Published
- Dec 17, 2014
- Granted
- Dec 18, 2019
- Deleted
- Jan 31, 2020
- Reason
- Annual fee unpaid
- IPC classes
- H01L 21/67 (2006.01)H01L 21/677 (2006.01)
- Priority
- DE 102012100927 06.02.2012
- PCT application
- PCT/IB2013/050416 17.01.2013
- PCT publication
- WO2013/118004 15.08.2013
- Filing language
- German
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Aug 19, 2020
Deleted, fee unpaid
Published in Swissreg on 19.08.2020
- Dec 18, 2019
Granted
Published in Swissreg on 18.12.2019
Parties
Inventor
MUELLER, Danny
09123 Chemnitz, DE
RASCHKE, Sebastian
09380 Thalheim, DE
MAI, Joachim
04603 Nobitz, DE
HEINZE, Andreas
98708 Gehren, DE
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.