SUBSTRATTRANSPORT
European patent · EP2948980 · Deleted
Register entry
- Publication number
- EP2948980
- Application number
- EP14702735
- Kind
- European patent with effect for Switzerland and Liechtenstein
- Status
- Deleted
- Specification
- Granted
- Filed
- Jan 22, 2014
- Published
- Dec 2, 2015
- Granted
- Aug 25, 2021
- Deleted
- Aug 24, 2023
- Reason
- Annual fee unpaid
- IPC classes
- H01L 21/673 (2006.01)H01L 21/67 (2006.01)H01L 21/677 (2006.01)
- Priority
- US 201361755156 P 22.01.2013
- PCT application
- PCT/US2014/012517 22.01.2014
- PCT publication
- WO2014/116681 31.07.2014
- Filing language
- English
- Source
- Swissreg
History
What the Federal Institute of Intellectual Property published about this title, newest first.
- Aug 24, 2023
Deleted, fee unpaid
Published in Swissreg on 24.08.2023
- Sep 9, 2022
Change
Published in Swissreg on 09.09.2022
- Sep 8, 2022
Further processing requested
Published in Swissreg on 08.09.2022
- Sep 1, 2022
Further processing requested
Published in Swissreg on 01.09.2022
- Aug 24, 2022
Deleted, fee unpaid
Published in Swissreg on 24.08.2022
- Jul 6, 2022
Change
Published in Swissreg on 06.07.2022
- May 2, 2022
Transferred
- Owner
- Brooks Automation, Inc., 15 Elizabeth Drive, Chelmsford, MA 01824, USA → Brooks Automation US, LLC, 15 Elizabeth Drive, Chelmsford, MA 01824, USA
- Representative
- Luchs & Partner AG, Patentanwälte, Schulhausstrasse 12, 8002 Zürich
Published in Swissreg on 02.05.2022
- Aug 25, 2021
Granted
Published in Swissreg on 25.08.2021
Parties
Agent
8002 Zürich
Inventor
Austin, TX 78700, US
Windham, NH 03087, US
Austin, TX 78746, US
Beverly MA 01915, US
The register names each party by name and address. A holder or agent is linked to an organization where exactly one entity of the commercial register bears its name; the street of a party not so recognised is not shown here.